@article {Tsai1969,
	title = {Shallow phosphorus diffusion profiles in silicon},
	journal = {Proceedings of the IEEE},
	volume = {57},
	year = {1969},
	month = {Jan-09-1969},
	pages = {1499 - 1506},
	issn = {0018-9219},
	doi = {10.1109/PROC.1969.7325},
	url = {http://ieeexplore.ieee.org/document/1449255/http://xplorestaging.ieee.org/ielx5/5/31124/01449255.pdf?arnumber=1449255},
	author = {Tsai, J.C.C.}
}
